Related styles and accuracy specifications can be adjusted to meet customer needs. Please contact the business unit for details.
UPC-12500
FOUP CLEANER (12")● High throughput ● Footprint design ● Energy-saving measures ● Cross-contamination prevention by fully automatic FOUP opening and closing ● Ultra-precision cleaning by two-fluid jet cleaning method ● High-efficiency drying method ● SEMI communication standard GEM300 compatible ● High delivery record ● SEMI S2, Compliant with S8 and CE standards
SC-8
BOX & CASSETTER CLEANER (8")● Compatible with various containers ● Space-saving / energy-saving design ● Hugle's unique ultra-precision cleaning ● High-efficiency hot-air knife drying to achieve complete drying ● Various options available ● Compliant with SEMI S2, S8, and CE standards
