For the robot spec., please refer to the HHI website
・Capable of particle removal without damaging the product
・Capable of 24 hours continuous operation
・Not required for consumable goods (water, solvent) for cleaning
・Normal maintenance only required for cleaning of bottom of cleaner
・Actual performance is in a wide range of industry such as semiconductor, FPD, electronic devices, electronic materials film
・Capable of particle removal without damaging the product
・Capable of 24 hours continuous operation
・Not required for consumable goods (water, solvent) for cleaning
・Normal maintenance only required for cleaning of bottom of cleaner
・Actual performance is in a wide range of industry such as semiconductor, FPD, electronic devices, electronic materials film