Related styles and accuracy specifications can be adjusted to meet customer needs. Please contact the business unit for details.
| Photo | Model | Arm | Degree of freedom (axes) |
Motion Range | Maximum reach(mm) |
Repeatability (mm) |
Cleanliness | Hand specification |
Controller | Software | Manual | ||||
| θ1 axis (rotation・JT2 (°) |
Z axis (up-down・JT3) (㎜) |
θ2 axis (rotation・JT4) (°) |
H1 axis (rotation・JT6) (°) |
H2 axis (rotation・JT7) (°) |
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 |
NTS10 | Single | 4 | 340 | 470 | 340 | 340 | - | 1066 | ±0.1 (Wafer Center) | ISO Class 1 | - | D60 ISO Class 1 |
Standard software for oparation KMTerm KSUtility Lite |
Operation manual Communication command manual Introduction procedure for integrated package software (K-Fast) |
|
NTS20 | Double | 5 | 340 | 470 | 340 | 340 | 340 | 1066 | ±0.1 (Wafer Center) | ISO Class 1 | - | D60 ISO Class 1 |
Standard software for oparation KMTerm KSUtility Lite |
Operation manual Communication command manual Introduction procedure for integrated package software (K-Fast) |
 |
TTS10 | single | 4 | 340 | 470 | 340 | 340 | - | 1066 | ±0.1 (Wafer Center) | ISO Class 1 | - | D60 ISO Class 1 |
Standard software for oparation KMTerm KSUtility Lite |
Operation manual Communication command manual Introduction procedure for integrated package software (K-Fast) |
|
TTS20 | Double | 5 | 340 | 470 | 340 | 340 | 340 | 1066 | ±0.1 (Wafer Center) | ISO Class 1 | - | D60 ISO Class 1 |
Standard software for oparation KMTerm KSUtility Lite |
Operation manual Communication command manual Introduction procedure for integrated package software (K-Fast) |